The Rise of China’s High-End Instruments: Anhui Tianfen Zirconia Analyzers Successfully Replace Japan’s Toray, Safeguarding China’s Semiconductor Manufacturing.

Introduction:   In the semiconductor industry “ Capillary ” Among them, in the process environment Trace oxygen content Conducting precise and stable monitoring is a core component for ensuring product yield and extending equipment lifespan. For a long time, this high-end market has been dominated by international brands, among which Japan’s Toray stands out. RF-400 The series is even regarded as an industry benchmark. However, this established pattern is now being disrupted.

Anhui Tianfen Instrument Co., Ltd. As a national high-tech enterprise specializing in the R&D and production of high-end zirconia oxygen analyzers, our core products have successfully replaced Toray of Japan in several leading semiconductor companies across China. RF-400 The trace oxygen analyzer has achieved a major breakthrough in key areas for domestically produced high-end analytical instruments!

Why semiconductor manufacturing is important to “ Trace oxygen ” So strict?

In the semiconductor manufacturing process, from crystal growth and oxidation diffusion to... CVD 、 PVD All thin-film deposition processes must be carried out in a protective atmosphere of ultra-high purity (such as nitrogen or argon). Even trace amounts of oxygen—typically requiring detection limits as low as ppb level), which is also sufficient to lead to:

• Wafer oxidation This creates defects that affect chip performance.
• Process gas contamination , resulting in the film purity failing to meet the standard.
• Equipment component damaged , increasing maintenance costs and the risk of downtime.

Therefore, real-time, online, and precise analysis of the oxygen content in process gas lines and ambient atmospheres is an uncompromising necessity in semiconductor manufacturing. “ Lifeline ”。

Challenging Industry Benchmarks: Tianfen Instruments' “ Hardcore ” Strength

Toray of Japan RF-400 Renowned for its stability and accuracy, Anhui Tianfen’s zirconia oxygen analyzers have successfully replaced it—not by chance, but rather thanks to our deep-rooted technological expertise and independent innovation.

1.  Breakthrough in Core Sensing Technology:
We possess completely independent intellectual property rights. High-performance zirconia sensor Through a special electrolyte material formulation and an advanced sintering process, our sensor... Low-temperature activity, long-term drift, and anti-contamination capability All have reached world-leading levels. Particularly in measurement... ppb Level Even at ultra-low oxygen concentrations, it can still ensure excellent response speed and measurement accuracy.

2.  Outstanding stability and reliability:
The semiconductor production line is... 7x24 It operates continuously for hours. Our analyzer uses... A uniquely developed temperature control system and signal processing algorithm effectively overcomes measurement errors caused by environmental fluctuations, ensuring long-term stable operation even under harsh conditions; mean time between failures ( Mean Time Between Failures ) Significantly enhanced, providing customers with reliable... “ Uninterrupted protection ”。

3.  Precise “ Chinese chip ” Algorithm:
It’s not just the hardware—built-in intelligent analysis software is equally crucial. We’ve conducted massive data modeling and algorithm optimization tailored to the various complex operating conditions of semiconductors, enabling our instruments to have stronger anti-interference capabilities and more intelligent self-diagnostic functions for faults. This significantly reduces maintenance difficulty and the risk of false alarms.

4.  Comprehensive localisation service advantages:
Compared to imported brands, we offer Faster response, more professional customized solutions, and more competitive pricing. From initial selection and installation to commissioning, as well as subsequent maintenance and technical training, Tianfen Instruments’ team of experts provides end-to-end support, thoroughly addressing the pain points of long lead times, slow service, and high costs associated with imported equipment.

Successful Application Case: Replacing Toray RF-400 , Customer Testimonials

Currently, Anhui Tianfen’s zirconia oxygen analyzers have been successfully applied at a well-known domestic semiconductor manufacturer. Front-end manufacturing ( FAB )   Section used to monitor its core diffusion furnace and CVD The equipment's protective gas system.

Alternative outcome:

• Performance benchmarking : In ppb Within the measurement range of the grade, the measurement data is highly consistent with that from the original Toray equipment and exhibits even greater stability.
• Cost reduction Direct procurement costs have dropped significantly, and subsequent spare parts and maintenance expenses have been reduced by even more. 50%。
• Efficiency improvement The local engineering team responded quickly, shortening the time required for on-site commissioning and problem resolution. 70% This ensures the continuous and stable production of the production line.

The client’s technical lead commented: “ When we initially chose Tianfen Instruments for testing, we did so with a bit of a “let’s give it a shot” attitude. The results were truly delightful—not only did their products fully meet our stringent technical requirements, but their outstanding stability also completely put us at ease about relying on domestically produced equipment. This successful substitution represents an important step toward localizing our supply chain. ”

Beyond Semiconductors: A Broader Range of Applications

In addition to shining brightly in the semiconductor industry, Anhui Tianfen’s high-end zirconia oxygen analyzers are also widely used in:

• New energy Sintering atmosphere control for lithium-ion battery materials.
• Metallurgical industry Monitoring of protective atmospheres in heat treatment furnaces and sintering furnaces.
• Air Separation Nitrogen Generation Detection of trace oxygen in high-purity nitrogen.
• Chemical Engineering and Scientific Research Various inert atmosphere processes and experimental environments.

Together with talent, we build together. “ Made in China with Intelligence ” The precise cornerstone

Anhui Tianfen Instrument Co., Ltd. takes technological innovation as its driving force and regards replacing imported products as its mission. We not only offer high-performance instruments, but also provide a guarantee that gives China’s high-end manufacturing sector peace of mind and hassle-free operation.

Choosing talent is choosing:

• Outstanding performance comparable to international standards
• Local service with no worries about the future
• Continuously optimized cost-effectiveness

If you’re struggling with the high costs and long lead times of imported analyzers, or if you’re looking for a stable and reliable domestic high-end alternative, contact us today!

Let’s join hands and harness China’s precision. “ Eyes ” , clearly see every key one. “ Breathing ” Let’s jointly promote China’s self-reliance and strength in the semiconductor and high-end manufacturing sectors!

Anhui Tianfen Instrument Co., Ltd.
Professional · Precise · Reliable